DLS-1000
The DLS-1000 is an improved, high sensitivity system. It is eight times more sensitive than its predecessor, the DLS-83D.
The system offers a fully automatic measurement mode, as well as provides complete interpretation of the measured data, including impurity identification and concentration determination without any need for user interaction.
The Deep Level Transient Spectroscopy (DLTS) is the best technique for monitoring and characterizing deep levels caused by intentionally or unintentionally introduced impurities and defects in semiconductor materials and complete devices.
DLS-83D
The DLS-83D offers a fully automatic measurement mode, as well as provides complete interpretation of the measured data, including impurity identification and concentration determination without any need for user interaction.
The Deep Level Transient Spectroscopy (DLTS) is the best technique for monitoring and characterizing deep levels caused by intentionally or unintentionally introduced impurities and defects in semiconductor materials and complete devices. It is an extremely versatile method for determining all parameters associated with deep traps, including energy level, capturing cross-section and concentration distribution. It allows the identification of the impurities, and is capable of detecting contamination concentrations below 109 atoms/cm3.
Cryostats for DLS
Semilab offers the following Cryostats to use with the DLS tools:
- Bath type cryostat: 80 K-450 K –– heating is computer-controlled – controller built into DLS-1000. Convectional (in LN2 atmosphere)
- Automatic LN2 cryostat 80 K-550 K (maximum 800 K optional). Sample in the vacuum chamber – requires computer-controlled heating and cooling (by LN2 boiling), requires controller – built into the DOS PC and cryostat control unit.
- Automatic He (closed cycle) vacuum cryostat: 30 K–325 K. Controller is commercial LakeShore – controlled by the DLS control software.
- Vacuum cryostats require vacuum pump (not included by default)