Ellipsometrik Porosimetry

Ellipsometry Porosimetry (EP)  measures the change of the optical properties and thickness of the materials during adsorption and desorption of a volatile specie either at atmospheric pressure (EPA) or under reduced pressure depending on the application (EP). The EP technic is unique by its ability to measure porosity of very thin films down to 10nm, reproducibility and its speeds of measurement. Compares to traditional Porosimeter, Ellipsometer porosimeters is well suited for very thin film pore size and pore size distribution measurement. Film porosity is a key factor in Silicon based technology using low k materials, organic industry (encapsulated OLED\’s) as well as in the coating industry using SolGel technics.

Ellipsometry porosimetry (EP) technology was patented by IMEC and licensed exclusively to Semilab.

List 2 product

PS-2000

Semilab Porosimeter Series (PS) metrology systems use Ellipsometry Porosimetry (EP) technique to provide reliable and precise measurements of thickness, refractive index, porosity, pore size distribution and Young modulus of porous thin films such as ultra-low K, porous Silicon, nanoparticle layers, metal oxides or barrier layers integrity… Combining solvent adsorption experiments in a high vacuum chamber to Semilab Spectroscopic Ellipsometry (SE) technology, the PS systems form a comprehensive metrology solution, helping our customers to develop, qualify and monitor current and future processes and especially solve the integration challenges of porous low K materials.

PS-2500

Semilab Porosimeter Series (PS) metrology systems use Ellipsometry Porosimetry (EP) technique to provide reliable and precise measurements of thickness, refractive index, porosity, pore size distribution and Young modulus of porous thin films such as ultra-low K, porous Silicon, nanoparticle layers, metal oxides or barrier layers integrity… Combining solvent adsorption experiments in a high vacuum chamber to Semilab Spectroscopic Ellipsometry (SE) technology, the PS systems form a comprehensive metrology solution, helping our customers to develop, qualify and monitor current and future processes and especially solve the integration challenges of porous low K materials.