Features and system specifications:
- Product series and sample size:
- IR-2500: 300 mm, with one FOUP loadport
- Each product is available with one of the following MBIR optics:
- The large spot optics (200×800 µm) are mainly used for films or for measurements in the device area of patterned wafers.
- The small spot optics (50 µm) enable measurements of scribe line test structures on patterned wafers.
- Cognex Patmax© pattern recognition
- Camera-based autofocus
- Robust glowbar/halogen source with a lifetime > 3 years
- EMC directive
- Low voltage directive
- SEMI standards compliant
- Windows-based software with menu-driven recipe selection/generation