Jandel Multiposition Wafer Probe Stand

Jandel Engineering Limited offers the Multiposition Probe stand as a solution
for measurements on wafers up to 200mm diameter). The probe is available in two
sizes at the same cost. One size is for wafers up to 150mm diameter and the second
for wafers up to 200mm diameter. If small sized wafers are to be measured the
smaller version is more suitable for placement of the wafers on the measurement
table. The Θ movement clicks in four positions at 90 degrees and the linear
movement in up to 10 positions giving repeat placement accuracy of +/- 1mm.

Description

Max. sample size 150mm wafer (200mm wafer on request at no extra cost)
Max. sample thickness Samples up to 4mm thick can be measured
Microswitch Prevents current flow when probe is not in contact with the sample
Manual Control Simple lever operation for probe contact and removal
Simple set up Single wire connects the probe stand and measurement equipment
X-? Stage Repositioning accuracy of +/-1mm

 

Type Tip R Force Spacing
A 40u 100g 1mm
B 100u 100g 1mm
C 200u 100g 1mm
D 500u 70g 1mm
E 40u 200g 1.591mm
F 40u 100g 0.635mm
G 100u 100g 0.635mm
H 200u 100g 0.635mm
Type A-D and F-H are user adjustable in the range 60g-150g and supplied at value shown