MCV-2200

The MCV automatic mapping systems provide a mercury C-V measurement for non-patterned wafers used in epitaxial silicon production and front-end semiconductor processing.

Description

In MCV-2200 and MCV-2500, the wafers are robotically loaded onto the mapping stage from a cassette or opened FOUP. The test wafer moves to each site specified in a pre-programmed map as electrical characterization tests are made. The system stores test data and reports them in a variety of formats.

Optional features:

  • ID reader (front or back, even in case of transparent samples like SiC, GaN)
  • Desorber
  • Light tower option
  • SECS/GEM host communication
  • Can be configured with 300 mm FOUP, 200 mm SMIF or OC

Wafer sizes:

  • Automatic wafer handling:
    • MCV-2200: from 100 mm to 200 mm
    • MCV-2500: from 200 mm to 300 mm
  • Manual wafer handling:
    • Full wafers:
      • MCV-2200: from 50 mm to 200 mm
      • MCV-2500: from 50 mm to 300 mm
    • Coupon samples or fractions:
      • minimum sample size is 40 mm × 40 mm