MCV-530

The MCV-530 system is designed for the fast and reliable testing of dielectric and epitaxial layers by mercury probe, and it is ideal for R&D or small volume production.

MCV-530/530L tools are manual loading systems, however they have the same measurement abilities like the automatic MCV-2200/2500 products.

Description

Wafer sizes:

Manual wafer handling:

  • Full wafers:
    • MCV-530L: from 50 mm to 200 mm
    • MCV-530:  from 50mm to 300 mm
  • Coupon samples or fractions:
    • minimum sample size is 40 mm × 40 mm