Photoluminescence tool for wafer and cell inspection

Inline photoluminescence tool is a fast and reliable solution for non-destructive measurement of wafer and cell quality at any stage of processing from as-cut wafers to finished cells.
Provides full control of material quality during the whole production.
Higher quality wafers create higher efficiency cells making the production more cost-efficient.


Features and System specifications:

  • Fully automated inline photoluminescence imaging and inspection
  • Reflection side photoluminescence on finished cells, processed and as-cut wafers
  • On the fly lifetime calibration
  • Quality description by calibrated lifetime map and custom classification parameters
  • Sample size: PLI-101/A up to 156 mm
  •                     PLI-103/A up to 162 mm
  • High equivalent in-line throughput

Types of detectable defects:

PLI-101, PLI-103


  • High dislocation density
  • Cracks
  • High contamination density
  • Edge (corner) contaminations
  • High vacancy density (for mono wafers)
  • Low lifetime

PLI-101, PLI-103


  • Shunt
  • Edge isolation defect
  • Bad finger

PLI-101A, PLI-103A

Passivation control (double side passivated samples)

  • Optional on-the-fly Jo and iVoc mapping

We offer automated PLI-200 version as well.