Description
Features and System specification:
- Capable for Fast and accurate measurement on square samples up to 350×450 mm or wafers up to 300 mm
- Special design of the chuck to hold Flexible Sample
- Active Vibration damping
- High-resolution mapping stage
- Fast Omron autofocus
- Vertical camera for samples visualisation & Pattern recognition
- Joystick to move the sample easily
- CE and SEMI standards compliant
Components & Options:
- Spectroscopic Ellipsometer:
- Fast acquisition directly on the foil
- Measurement Spot adapted for Plastic substrate
- Spectroscopic Reflectometer:
- For reflection and transmission of the films
- Non-contact Sheet resistance:
- Fast and accurate Sheet resistance by Eddy Current
- For Transparent electrode and Metal
- Other measurement technique like Raman, Lifetime…etc
Applications:
- Display: TFT, OLED on Glass or Flexible substrate
- Lighting: New OLED Lighting application. White OLED
- Printed Electronics: Any process on flexible substrate (transistor, sensors, etc.)
- Photovoltaics: Small Thin Films PV panels, TCO panels