SE-2100

Printed Electronics. Optical & Electrical Metrology. Thin Film Coating characterization. Layer Thickness control.

Description

Features and System specification:

  • Capable for Fast and accurate measurement on square samples up to 350×450 mm or wafers up to 300 mm
  • Special design of the chuck to hold Flexible Sample
  • Active Vibration damping
  • High-resolution mapping stage
  • Fast Omron autofocus
  • Vertical camera for samples visualisation & Pattern recognition
  • Joystick to move the sample easily
  • CE and SEMI standards compliant

Components & Options:

  • Spectroscopic Ellipsometer:
    • Fast acquisition directly on the foil
    • Measurement Spot adapted for Plastic substrate
  • Spectroscopic Reflectometer:
    • For reflection and transmission of the films
  • Non-contact Sheet resistance:
    • Fast and accurate Sheet resistance by Eddy Current
    • For Transparent electrode and Metal
  • Other measurement technique like Raman, Lifetime…etc

Applications:

  • Display: TFT, OLED on Glass or Flexible substrate
  • Lighting: New OLED Lighting application. White OLED
  • Printed Electronics: Any process on flexible substrate (transistor, sensors, etc.)
  • Photovoltaics: Small Thin Films PV panels, TCO panels