MicroXact can provide high precision thermal chucks in sizes ranging from 35mm to 300mm. We also supply the controller and other accessories which enable our thermal chucks to achieve temperatures as low as -190°C or as high as 600°C (depending on size and configuration).
As with our standard vacuum chucks, the thermal chucks are available in electrically grounded, floating with coaxial connection, or electrically guarded triaxial configuration.
As an option for customers who need to test or sort individual die (no longer in wafer form), we offer a chuck designed to hold as many as four of the 2″ Gel-Paks® or waffle packs. The chuck holds Gel-Paks® securely enough that vacuum is not necessary, particularly important when the die are on a vacuum-release Gel-Pak®.