(EN) The ACV systems provide 100% non-contact, non-destructive measurements for epi layer resistivity by patented technology. The physics behind the measurement is quite similar to C-V Schottky or Hg-probe, and thus the output is a traditional C-V doping profile. The difference is that the electrode does not touch the wafer, resulting in substantial cost savings of monitor wafers.

The model includes complete automation, powerful software and excellent measurement repeatability.


Sorry, this entry is only available in Amerikan İngilizcesi.