Jandel RM3000 Test Unit

Jandel Engineering Limited offers the RM3000 for use in making four point probe measurements. The RM3000 can supply constant currents between 10nA and 99.99mA, and measure voltages from 0.01mV to 1250mV.
For sheet resistance measurements the quoted range is 1 milliohm/square to 5 x 108 ohms/square. Measurements outside this range are possible but with possible reduced accuracy.
For volume (bulk) resistivity measurements the quoted range is 1 milliohm.cm to 1 x 106 ohm.cm. Measurements outside of this range may be possible but will depend on sample type e.g. whether the sample is a thin layer.



Measurement Range  1 mohm/square – 500 Megohms/square, 1 mohm.cm – 1 Megohm.cm
Units mV    ohm/square    ohm.cm (wafers)    ohm.cm (volume)
Onboard Memory 50 time-stamped measurements
Software For operation and data control supplied free of charge
Autorange Determines appropriate current settings
Current 10nA – 99.99mA, reversible to verify contact and measurement
Accuracy 0.3% across range, better than 0.1% in mid range
Connections USB or RS-232
Correction Option to input correction factor to adjust displayed readings
Ohm.cm Option to input probe spacing or wafer thickness for auto calculation
AFPP Powers and controls the optional automatic Z axis AFPP unit

Unit Selection

Measurements can be displayed on screen as mV, ohms/square or ohm.cm. There is a facility to input either probe spacing or wafer thickness so that ohm.cm values can be automatically calculated and displayed.

Computer connection and Software

The RM3000 can be connected to computer by either USB or RS-232 connection. The customer can operate the unit using the computer keyboard, terminal emulation software such as HyperTerminal, or with the free software provided.



If you require any further information on the Jandel RM3000 Test Unit please do not hesitate to contact us at Jandel using the details below