RGA Series — Up to 300 amu gas analyzers

The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA’s provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.

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Description

RGA Series Specifications
Operational
Mass range
    RGA100 1 to 100 amu
   RGA200 1 to 200 amu
    RGA300 1 to 300 amu
Mass filter type Quadrupole
Detector type Faraday cup (FC)—standard, electron multiplier (EM)—optional
Resolution Better than 0.5 amu @ 10 % peak height (per AVS std. 2.3). Adjustable to constant peak width throughout the mass range.
Sensitivity (A/Torr) 2 × 10-4 (FC), <200 (EM). User adjustable throughout high voltage range. Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.
Minimum detectable partial pressure 5 × 10-11 Torr (FC). 5 × 10-14 Torr (EM). Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy , 12 eV ion energy, and 1 mA electron emission current.
Operating pressure 10-4 Torr to UHV (FC)
10-6 Torr to UHV (EM)
Max. operating temp. 70 °C
Bakeout temperature 300 °C (without ECU)
Ionizer
Design Open ion source, cylindrical symmetry, electron impact ionization.
Material SS304 construction
Filament Thoriated-iridium (dual) with firmware protection. Built-in 1 to 10 W degas ramp-up. Field replaceable.
Electron energy 25 to 105 V, programmable
Ion energy 8 or 12 V, programmable
Focus voltage 0 to 150 V, programmable
Electron emission current 0 to 3.5 mA, programmable
General
Probe dimension 8.75″ from flange face to top of ionizer
Probe insertion 2.0″
Probe mounting flange 2.75″ CF
Minimum tube I.D. 1.375″
ECU dimensions 9.1″ × 4.1″ × 3.1″ (WHL) Easily separated from the probe for bakeout.
LED indicators Power ON/OFF, filament ON/OFF, degas ON/OFF, electron multiplier ON/OFF, RS-232 Busy, Error, Overpressure, Burnt Filament.
Warm-up time Mass stability ±0.1 amu after 30 minutes
Computer interface RS-232C, 28,800 baud with high-level command set
Software Windows based application
Power requirement 24 VDC @ 2.5 amps. Male DB9 connector. Optional 110/120/220/240 VAC adapter.
Weight 6 lbs.
Warranty One year parts and labor on defects in materials and workmanship

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