WT-2000/2A

The WT-2000 is suggested for mid-range fabs and laboratories

Description

Features and System specifications:

  • Wafer size: up to 300 mm with bare or dielectric coated surface
  • Wafer handling: manual or Semilab-made indexer
  • Loading options:
    • 100-200 mm cassette indexer
    • 300 mm 13 slot cassette indexer, including open cassettes for 100-300 mm wafers
    • 300 mm 25 slot cassette indexer, including FOUP, FOSB, and open cassettes for 100-300 mm wafers
  • Light sources: semiconductor lasers (SPV head with 4 or optional 8 lasers)
  • Available wavelengths: 1015 nm – 660 nm
  • Full mapping with 2, 4, 8 and 16 mm raster
  • Point measurements at predefined points
  • Sample resistivity: down to 0.01 Ωcm
  • Optional bias light:
    • High intensity IR LED
    • 30 W halogen lamp
  • Automatic Iron-Boron Dissociation Unit – for Iron concentration
  • Specific measurement performance at specific, programmable locations

Each system can be configured based on the user’s requirements by adding measurement capabilities and automation capabilities described below.

Measurement capabilities:

  • µ-PCD for measuring carrier lifetime
  • SPV for measuring diffusion length
  • VQ for oxide monitoring
  • JPV for measuring ion implants
  • Eddy current measurement of sheet resistance