Description
FEATURES
- MPS series magnetic probe stations are the only probe stations on the market that offer arbitrary two- or three-dimensional orientation of applied magnetic field, making these probe stations an ultimate solution for spintronic device characterization and spintronic research.
- MPS series magnetic probe stations are the only probe stations on the market that offer wafer-scale Vector magnetic field probing, making these systems ideally suited for testing of spintronic and magneto-electronic devices in production environments.
- Fully customizable, open-source LabView-based control software that easily integrates with the most common test and measurement devices.
- Available high-resolution micropositioners with 40, 80, 100 and 200TPI screws for down to micron-level positioning of probes.
- Data collected and/or analyzed with a wide range of output formats and options available.
- Systems are supplied with a three-dimensional Hall probe to provide unmatched stability and accuracy of the applied magnetic field via closed-loop control.
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OPTIONS
- Upgrade for 150mm or 200mm wafers.
- Extended magnetic field uniformity.
- Extended magnetic field stability.
- Extended magnetic field range (from below 100μT to 0.3T for MPS-C-300 and to 0.6T for MPS-C-350).
- High-resolution microscopes.
- Polarizing microscopes for domain imaging during probing.
- Upgrade for RF probing.
- Extended temperature range probing.
- Wide selection of cameras.
- Wide selection of wafer chucks.
- Wide selection of micropositioners, probe arms and probe tips.
- Ultra quite vacuum pump.
- Controlled environment measurements.
MAGNETIC PROBE STATION SPECIFICATIONS
MPS-C-350
- MPS –C-350 is the most powerful MicroXact’s probe station for testing devices in 3D magnetic field.
- It is available with and without feedback control loop.
- The system uses three water-cooled C-magnets and requires either tap water or external chiller.
- Various accessories (microscopes, micropositioners, DC or RF probes, light tight enclosure, thermal chucks) are available.
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Wafer Size
100mm, 150mm or 200mm
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Magnetic field orientation
Arbitrary 3D
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Maximum magnetic field
6kOe (0.6T)
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Magnetic field orientation accuracy
+/- 0.1°
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Magnetic field uniformity across 10mm diameter area
+/- 2%
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Magnetic field stability
Better than 0.1%
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Wafer XY positioning resolution
Better than 3μm (better than 2μm are available as option
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Platen Z travel
12.5mm
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Microscope
Several options available
MAGNETIC PROBE STATION SPECIFICATIONS
MPS-C-300
- MPS-C-300 is the less powerful but also more affordable version of MicroXact’s 3D magnetic field probe stations.
- It is available with and without feedback control loop.
- The system is upgradable to 150mm or 200mm wafers chucks.
- Various accessories (microscopes, micropositioners, DC or RF probes, light tight enclosure, thermal chucks) are available.
-
Wafer Size
100mm, 150mm or 200mm
-
Magnetic field orientation
Arbitrary 3D
-
Maximum magnetic field
3kOe (0.3T)
-
Magnetic field orientation accuracy
+/- 0.1°
-
Magnetic field uniformity across 10mm diameter area
+/- 2%
-
Magnetic field stability
Better than 0.1%
-
Wafer XY positioning resolution
Better than 3μm (better than 2μm are available as option
-
Platen Z travel
12.5mm
-
Microscope
Several options available
