Manual Probe Stations

The SPS-1000, SPS-2000, and SPS-2200 systems are MicroXact’s premier manual probe stations designed to be flexible and easy to use. The high level of performance and affordability of these manual probe systems put them in a class of their own.

With up to 200mm wafer capabilities, DC or RF probes and optional thermal chuck, and a variety of shielding options, our probe stations can be used for the wide range of applications, such as failure analysis, reliability testing, IV/CV testing, low current testing and microwave and RF characterization to name a few.

IV, CV and low current testing with MicroXact’s manual probe stations provide the precise and accurate measurements needed for characterization of semiconductor devices. Wafer-level capacitance and low current testing on dies has never been easier due to the variety of options available and the flexibility of MicroXact’s manual probe stations.

Description

FEATURES

  • Manual stage assembly is available with additional preload slide for easy loading and unloading of wafers or samples.
  • Manual control of platen and chuck Z-position with coarse and fine adjustments.
  • Smooth cast steel platen holds up to 10 magnetic or vacuum-based positioners.
  • Coaxial and triaxial chucks as well as enclosures are available for low leakage current testing.
  • Standard boom mount assembly for full-range XYZ positioning of microscope.
  • Available high-resolution micropositioners with 80TPI screws for μm-level positioning of probes
  • Available high-resolution micropositioners with 80TPI screws for μm-level positioning of probes.
  • RF options available include customizable RF probes, RF chuck, and shielding enclosures.

OPTIONS

  • High-resolution compound microscopes.
  • Polarizing microscopes.
  • Wide selection of cameras.
  • RF biasable chuck and shielding enclosures.
  • Gold-plated, improved flatness adjustable vacuum chucks.
  • Ultra quite vacuum pump.
  • Thermal chuck with temperature range of -65°C to >400°C (higher temperatures are possible as well).
  • Adapted systems for ultrasonic and laser cutting.
  • Optional choice of XY translation stage and extra-sturdy welded steel bridge for high-resolution microscopes.

SPS-2000

  • Wafer Size

    Up to 100mm

  • XY Stage Travel

    Up to 125mmx125mm

  • XY Stage Resolution

    5μm

  • XY Stage Bearings

    Precision cross-roller

  • Platen Travel

    12.7mm or more

  • Platen Adjustment

    Dual coarse and fine control with better than 1.5μm repeatability

  • Platen Planarity

    <12.7μm across 150mm

  • Platen Rigidity

    <50μm for 4.5kg

  • Vacuum Chuck

    Multi-zone vacuum

  • Chuck Flatness

    +/-13μm

  • Chuck Breakdown Voltage

    At least 500V

  • Chuck Isolation

    At least 1GΩ

  • Chuck Adjustment

    360° coarse, +/-6° fine

  • Microscope

    High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X

  • Feedthrough Terminals

    BNC, Triax or Banana plug

  • System Dimensions

    56cm wide x 51cm deep x 61cm high

  • System Weight

    35kg to 45kg depending on options selected

 

SPS-2200

  • Wafer Size

    Up to 200mm

  • XY Stage Travel

    Up to 200mmx200mm

  • XY Stage Resolution

    5μm

  • XY Stage Bearings

    Precision cross-roller

  • Platen Travel

    12.7mm or more

  • Platen Adjustment

    Dual coarse and fine control with better than 1.5μm repeatability

  • Platen Planarity

    <12.7μm across 200mm

  • Platen Rigidity

    <50μm for 4.5kg

  • Vacuum Chuck

    Multi-zone vacuum

  • Chuck Flatness

    +/-13μm

  • Chuck Breakdown Voltage

    At least 500V

  • Chuck Isolation

    At least 1GΩ

  • Chuck Adjustment

    360° coarse, +/-6° fine

  • Microscope

    High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X

  • Feedthrough Terminals

    BNC, Triax or Banana plug

  • System Dimensions

    92m wide x 122cm deep x 92cm high

  • System Weight

    ~70 kg