Description
FEATURES
- Manual stage assembly is available with additional preload slide for easy loading and unloading of wafers or samples.
- Manual control of platen and chuck Z-position with coarse and fine adjustments.
- Smooth cast steel platen holds up to 10 magnetic or vacuum-based positioners.
- Coaxial and triaxial chucks as well as enclosures are available for low leakage current testing.
- Standard boom mount assembly for full-range XYZ positioning of microscope.
- Available high-resolution micropositioners with 80TPI screws for μm-level positioning of probes
- Available high-resolution micropositioners with 80TPI screws for μm-level positioning of probes.
- RF options available include customizable RF probes, RF chuck, and shielding enclosures.
OPTIONS
- High-resolution compound microscopes.
- Polarizing microscopes.
- Wide selection of cameras.
- RF biasable chuck and shielding enclosures.
- Gold-plated, improved flatness adjustable vacuum chucks.
- Ultra quite vacuum pump.
- Thermal chuck with temperature range of -65°C to >400°C (higher temperatures are possible as well).
- Adapted systems for ultrasonic and laser cutting.
- Optional choice of XY translation stage and extra-sturdy welded steel bridge for high-resolution microscopes.
SPS-2000
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Wafer Size
Up to 100mm
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XY Stage Travel
Up to 125mmx125mm
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XY Stage Resolution
5μm
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XY Stage Bearings
Precision cross-roller
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Platen Travel
12.7mm or more
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Platen Adjustment
Dual coarse and fine control with better than 1.5μm repeatability
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Platen Planarity
<12.7μm across 150mm
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Platen Rigidity
<50μm for 4.5kg
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Vacuum Chuck
Multi-zone vacuum
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Chuck Flatness
+/-13μm
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Chuck Breakdown Voltage
At least 500V
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Chuck Isolation
At least 1GΩ
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Chuck Adjustment
360° coarse, +/-6° fine
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Microscope
High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
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Feedthrough Terminals
BNC, Triax or Banana plug
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System Dimensions
56cm wide x 51cm deep x 61cm high
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System Weight
35kg to 45kg depending on options selected
SPS-2200
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Wafer Size
Up to 200mm
-
XY Stage Travel
Up to 200mmx200mm
-
XY Stage Resolution
5μm
-
XY Stage Bearings
Precision cross-roller
-
Platen Travel
12.7mm or more
-
Platen Adjustment
Dual coarse and fine control with better than 1.5μm repeatability
-
Platen Planarity
<12.7μm across 200mm
-
Platen Rigidity
<50μm for 4.5kg
-
Vacuum Chuck
Multi-zone vacuum
-
Chuck Flatness
+/-13μm
-
Chuck Breakdown Voltage
At least 500V
-
Chuck Isolation
At least 1GΩ
-
Chuck Adjustment
360° coarse, +/-6° fine
-
Microscope
High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
-
Feedthrough Terminals
BNC, Triax or Banana plug
-
System Dimensions
92m wide x 122cm deep x 92cm high
-
System Weight
~70 kg
