EIR-2500
(EN) The EIR-2500 is a unique automated epi thickness measurement tool with infared spectroscopic reflectometer for high throughput epi thickness measurement. Fully compliant to the relevant SEMI / CE standards. The EIR product line is based on smart, reliable electronics, which improves tool uptime and decreases maintenance needs.
Electrode – Glassy Carbon – Disk (3mm)
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Refillable Hg/Hg₂Cl₂ (calomel) reference electrode in 3 M KCl electrolyte
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Additional vial of 3 M KCl electrolyte solution provided
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Dimensions: 110 mm length x 12 mm diameter
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Glass body with connector type: 1 m cable terminating in 4 mm banana plug
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Temperature Range: 0°C – 60°C
Electrode – Gold – Disk (3mm)
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PEEK (polyetheretherketone) body with gold plated connector pin
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Dimensions: 73 mm length x 6 mm OD, 3 mm Au disk diameter
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Purity: 99.99%
Electrode – Platinum – Auxiliary
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Glass body with gold plated connector pin
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Dimensions: 81 mm length x 6 mm diameter
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Pt area: 6 mm x 6 mm x 0.2 mm
Electrode – Platinum – Disk (3mm)
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PEEK (polyetheretherketone) body with gold plated connector pin
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Dimensions: 73 mm length x 6 mm OD, 3 mm Pt disk diameter
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Purity: 99.99%
EN-VISION
(EN) En-Vision (Enhanced Vision) provides non-contact measurements of buried defects, such as dislocations, oxygen precipitates or stacking faults. These are not visible using optical inspection. By bringing buried defect control inside the IC Fabs and covering a wide range of density and applications, En-Vision dramatically enhances buried defect detection by more than a 100× compare to traditional techniques (X-TEM / SECCO etching).
En-Vision offers a high dynamic range in both defect size (15 nm to sub-micron) and density (E6 – E 10 /cm3).
EverBright (150-250 mJ @ 1064 nm)
(EN) The EverBright is a new laser for double pulse LIBS applications.
The EverBright follows the same design concepts as Quantel’s EverGreen PIV laser system, the standard for PIV lasers in the market. The resonators in the EverBright are replaced with GRM versions to generate the low beam divergence needed for LIBS applications.
With the dual pulse output 1 pulse can be used as a cleaning shot or to reheat the plasma
- Low divergent resonator design (< 1.5 mrad) for focusing to small spot sizes
- 2 x 1064 nm laser pulses with variable time delay
- 2 models with 150 and 250 mJ pulse energy per pulse
- 2 lasers in one box design
- Sealed for installations in different environments
- 15 Hz repetition rate
- Horizontal and vertical, cross polarized
EverGreen (70-200 mJ @ 532 nm)
(EN) The EverGreen is a dual pulsed laser for PIV applications with a choice of pulse energies and repetition rates: 70 mJ, 145 mJ or 200 mJ at 15 Hz and 100 mJ at 25 Hz. The system consists of a single laser head with a single power supply. The EverGreen delivers a perfect combination of precisely overlapped 532 nm beams in a rugged, compact package. In addition Quantel also offers a version with 30 mJ at 266 nm with a repetition rate of 15 Hz.
- 2-year warranty including beam overlap
- Low energy alignment mode button
- Flashlamp lifetime guaranteed for 100 million shots
- Grab and go handles
- System parameters stored in laser head
- Built to withstand harsh environments
- Temperature cycled and vibration tested
- Quick connect umbilicals
EverGreen HP (50-340 mJ @ 532 nm)
(EN) The EverGreen HP (High Power) is a dual pulsed laser for PIV applications. It uses two DRL models in one common laser head with beam combination optics. The design enables a broad range of pulse energy and repetition rate combinations. Two versions of power supplies are used to cover the whole range of repetition rates.
The EverGreen HP covers 15 – 200 Hz with pulse energies of 340 – 50 mJ at 532 nm. The laser head is compact for easy integration and sealed to operate in various environments.
- Available in 532 nm
- Quick umbilical disconnects
- Compact
- Multimode resonators
- 100 million shots lamp lifetime guaranteed
- Sealed laser head to operate in various environments