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Intelligent lift pins
Gently secure flat and warped wafers because of the soft, flexible tips on the PID controlled wafer lift pins. Vacuum sensing and switching are intelligently timed with the lift pin position throughout the load, clamp, and unload cycle.
Wafer pusher
In cases of extreme warpage, an optional wafer pusher ensures precise clamping. The high airflow of vacuum chucks pulls down wafers.
Wafer cleaning unit
Keep test debris away from the wafer or the wafer chuck with a blower and vacuum cleaner or a roller with sticky foil, for pre- and post-cleaning.
Wafer/panel handler (EFEM)
Integration transforms the bond tester into a fully automated system. We offer various types of wafer handlers (Equipment Front End Module), for operator-free bond testing.
Panel chuck work holder
Vacuum work holder for panels or wafers up to 300 mm. Easily reach 100% of a 300 mm panel without repositioning your sample on the chuck. The wafer chuck work holder comes with safety interlocks and 360° rotation.
Substrate wafer map import
Easily import and export multiple file formats for wafer maps such as KLARF, (S)INF, G85, and others for full traceability. Defects or test positions are shown in an overview and are directly accessible for testing or analysis.
Big bump removal
Automatically shear the big bumps and clean the debris to prepare for wafer probing. Fully programmable vision algorithms can check if the removal of big bumps was successful.
CBP Jaw Cleaner
The solder that builds up in the cavity of the Cold Bump Pull (CBP) jaw reduces the gripping efficiency. This contactless cavity cleaner melts the solder with a high temperature and high-pressure air jet and then blows it into a fine matrix where it is absorbed.
Handlers
Robotic handling ensures safe load and unload of applications and avoids handling error and damage. We offer handlers for:
- Wafers (EFEM)
- Waffle trays
- Magazines
No more cartridge exchanges
The Revolving Measurement Unit (RMU) houses up to 6 flexible sensors that are configurable with various pull, peel, push, or shear tools. This enables continuous testing up to 200 kgf.
Control your alignment
Tweezers
You can control the gripping force and the opening and closing position. There is a choice of 3 types of tweezers:
- Electric (USB)
- Mechanical
- Pneumatic
Your sample fits, too!
- Quick release work holders
- Maximize your throughput
- Accurate alignment
- Wide selection and customized clamping solutions
- High axis speed, direct-drive motor, linear encoders
- Secure lock maintains reproducible positioning
A pleasure to set up
- Easy sample access
- Flexible LED lighting options
- Designed with the operators in mind
- Adjustable microscope
- No stress working conditions
Easy to use for everyone
- Flexible on-board Statistical Process Control (SPC) analysis
- Unique form features for SPC management
- Software has Easy and Expert modes
- Control chart and real-time force graphs
- Flexible export and SECS/GEM
Modular by design
- Customized tools and work holders
- Operator free loading options
- Powerful camera options
Specifications Sigma W12
| STAGES | SIGMA W12 |
|---|---|
| X-stage (mm) | 500 |
| Y-stage (mm) | 370 |
| Z-stage (mm) | 90 |
| Axis speed (mm/s) | 50 |
| Resolution linear encoders (backlash free drives) (nm) | 30 |
| Digital temperature correction |  |
| ACCURACY | |
| Accuracy (%) | 0.075 |
| ADC resolution (bit) | 24 |
| Sampling frequency (kHz) | 10 |
| Shear height (step back) accuracy ±1 μm | |
| Programmable landing force down to 5 gf | |
| MECHANICAL | |
| Footprint X (mm) | 1300 |
| Footprint Y (mm) | 935 |
| Height (mm) | 608 |
| Weight (± kg) | 100 |
Please contact us for more information and options for your factory. Specifications are subject to change without prior notice.
Standard
Optional
Not available
