LCS- 4000 Series Analytical Probe Station with Laser Cutting System

Description

FEATURES

• System integrates the Laser Cutting System for selectively removing material, such as topside layer removal, making high-precision cuts and marking metal.
• Designed for simultaneous DC and/or RF probing while laser trimming leads or removing defects from devices.
• Fully motorized system allows user to remotely position the sample stage, the platen and the microscope independently while the system is entirely contained in a light-tight enclosure for safe and easy operation of the system.
• Standard configuration includes independent 100 mm x 100 mm range of motion for sample stage and microscope (larger ranges available).
• Multi-axis dual joystick controller provides easy operation of all motion components and can be customized to include a variety of additional functions.
• System can be upgraded to include semi-automated control of wafer probing.
• Isolated feed-through terminals located on both sides of station for convenient connection to micropositioners can be customized for BNC, Triax, or DC pin connections.

OPTIONS

• The following specifications are for a standard configuration. In most cases, each LCS-4000 Probe Station system can be customized to exceed these values.
• Variety of high-resolution compound microscopes fitted for laser systems.
• Polarizing microscopes.
• Choice of laser capable of 2 or 3 wavelengths.
• Wide selection of cameras.
• Precision XY stage with pneumatic position lock and single-hand positioning.
• RF biasable chuck and shielding enclosures.
• Polished brass or gold-plated adjustable vacuum chucks.
• +/-2.5μm flatness of the chuck.
• Ultra quiet vacuum pump.
• Thermal chuck with temperature range of -100°C to +200°C.
• Adapted systems for ultrasonic and laser cutting.
• Optional choice of XY translation stage for microscope provides 2.5″ x 2.5″ range of motion.
• Fully automated versions are available

LSC-4000 PROBE STATION SPECIFICATIONS

The following specifications are for a standard configuration. In most cases, each LCS-4000 Probe Station system can be customized to exceed these values.