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XYZ Objective Mounts

Fine XYZ axis Adjustable
Suitable for microscope objective & pinhole cells

Semi-Auto Closed Cycle Cryogenic Probe Station

The Models CPS-XXX-CF-PLUS enables fast and cost-effective testing of wafers and devices at cryogenic temperatures down to 9K (single CCR system), 4.5K (dual CCR system) or even below 4K (triple CCR system).

We offer systems for testing 100mm, 150mm, 200mm or 300mm wafers with optional load lock capabilities. The systems can be configured with individual probe arms (optionally with wedge probes) or with probe card holders. High density probing with >100 of DC probes is possible. Such systems are ideal for emerging field of quantum computing as well as established fields of superconducting electronics.

Semi-Automated Probe Stations

The SPS 2600, SPS 2800, and SPS 12000 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis. These semi-automatic probe station systems are designed to support manual and semi-automatic probing of up to 200mm wafers.

As semiconductors become smaller and more complex, it has become necessary to more closely monitor and control production, especially further upstream in the process. Wafer level reliability testing performed with MicroXact’s semi-automatic probe station gathers data through series of stress tests to identify irregularities that could affect the long-term reliability of the device. Although not always needed, further and extensive failure analysis can be performed after the wafer level reliability testing.

These semi-automatic probe station systems are built on a heavy-duty, versatile platform capable of being configured to handle a wide range of probing applications. With a variety of options available, including heated/cooled wafer chucks, standard or digital microscopes, and programmable stage indexing, MicroXact’s semi-automated probe stations offer a cost-effective and easy-to-use solution for all your high productivity device characterization and wafer level reliability testing needs. Three options (standard, high-precision, and high-speed) are available for these semi-automatic probe stations

Semi-Automated Vacuum Probe Systems

The SPS-2600-VAC and SPS-2800-VAC Series are MicroXact’s vacuum probe systems designed to support motorized or semi-automatic probing of up to 100mm or up to 200mm wafers in a vacuum or controlled gas atmosphere. This vacuum testing solution is systematic and precise, cost-efficient, low noise and convenient-to-use. These vacuum probe systems are built on a vibration-compensated, versatile platform capable of being configured to handle a wide range of probing applications. Ideal for icing-free testing down to 77K or for high temperature testing of devices and components that are prone to oxidation, MicroXact’s vacuum probe systems offer controlled environment wafer-level probing.

Semiconductor Device Testers

Avtech offers a range of solutions for semiconductor test requirements. Avtech can supply products suitable for many test requirments, including:

  • Reverse Recovery Time Tests (MIL-STD-750-4 Method 4031, etc.)
  • Forward Recovery Voltage and Time Tests (MIL-STD-750-4 Method 4026, etc.)
  • Transistor Switching Time Tests (MIL-PRF-19500, etc.)
  • Phototriac dV/dt Tests
  • Laser Diode Pulse Testing
  • Production Pulsed V-I Tests

Green Laser Series

RMI Laser’s Green Laser Marker Series is designed to mark highly reflective materials or highly sensitive substrates like silicon wafers with ease and precision. They operate in the visible light spectrum at 532 nm (Green).

The green laser marker is perfect for softer plastics, PCB Boards, IC Chips and for scribing or marking of Solar Cells of various material compositions. RMI Laser was one of the pioneers of green laser marker technology, and we’ve used that experience to develop a green laser that meets the special needs of semiconductor and solar marking applications.

The inherent advantages of the 532 nm wavelength are greater absorption across a wider range of materials, along with mitigated thermal energy allowing it to mark substrates that 1064 nm Near-IR lasers simply cannot. Along with these advantages, the Green Laser Series has very tight spot sizes with the smallest being around 10 um.

The Green Laser Series is available in 5 watts with an industry leading complete 3 year warranty.